Micro-Fabrication

The Micro-Fabrication Core Technology Platform is used for systems in biosensing, energy conversion, and human health. Utilizing spin coating, mask and bond aligning, reactive ion etching, and vacuum evaporator techniques, this CTP helps researchers produce micro- and nano-materials in a class 1,000 cleanroom environment.

Equipment List

  • 3D Nano Printer - Nanoscribe Photonic Professional GT
  • Direct Laser Writer - Heidelberg Instruments DWL66+
  • Denton Vacuum Evaporator DV-502B 
  • Mask Aligner - Karl Suss MA8
  • Micro Discpensing System - M24You Two-200
  • Microplotter System - SonoPlot GIX II
  • Parylene Deposition - Specialty Coating Systems PDS 2010
  • Physical Vapor Deposition - Lesker Proline PVD 75
  • Plasma Processor - Femtoscience COVANCE
  • QSense Analyzer -Biolin QCM-D
  • Rapid Thermal Processing - Jipelec JetFirst 200C
  • Reactive Ion Etcher - Advanced Vaccum Vision 320
  • Spin Coater - Laurell WS650
  • Surface Profler - Dektek XT-A
  • Time-resolved Electrochemical Quartz Crystal Microbalance (EQCM)r