Micro-Fabrication
The Micro Fabrication Core Technology Platform has the equipment necessary to perform lithography for microelectromechanical systems (MEMS) and microfabrication.
Researchers are utilizing this CTP to build microfluidic platforms for high-throughput drug screening, develop ultrasensitive point-of-care diagnostic chips for early detection of cancer and other diseases, design chips to isolate fetal cells from maternal blood and create portable platforms for monitoring the quality of water in developing and developed countries.
Equipment List
- 3D Nano Printer - Nanoscribe Photonic Professional GT
- 3D Nano Printing System-Nanoscribe Quantum X Bio
- Atomic Layer Deposition (NLD-3500)
- Magnetron Sputter - ATC ORION Series UHV Sputtering System
- Mask Aligner - Karl Suss MA8
- Mask Writer - Heidelberg Instruments DWL66+
- Micro Dispensing System - M24You InstrumentTwo-200
- Microplotter system - SonoPlot GIX II
- Physical property measurement system (PPMS) – Quantum Design DynaCool 9T
- Plasma Processor - Femtoscience COVANCE
- PVD - Lesker Proline PVD 75
- QCMD - Biolin QSense Analyzer
- QSense High Pressure
- Rapid thermal processing - Jipelec JetFirst 200C
- Reactive Ion Etcher - Advanced Vacuum Vision 320
- SDS PDS 2010 Labcoater 2 Parylene deposition system
- Spectroscopic Imaging Nulling Ellipsometer Accurion EP4
- Spin Coater - Headway PWM32-PS
- Surface Profiler - Dektek XT-A
- Thermal Evaporator – Angstrom Engineering Nexdep 400
- Vertisis Technology – MagVision Kerr System