Facility

MA8 of Karl Suss is a manual high precision mask aligner to pattern microstructures on various positive and negative photoresists through an aligned mask. It is a full-filed exposure system capable of exposing wafers and substrates up to 200mm. It is regarded as the benchmark in semiconductor submicron research and 3D micro system production. It allows both proximity and contact printing (soft, hard, vacuum), allowing for a resolution of 2.5um in proximity mode and submicron below 0.5um in vacuum contact mode. Our system comes with a bottom side alignment (BSA) to pattern the top side of the wafer with features accurately aligned to the bottom side. The MA8 Gen3 BSA system offers an alignment accuracy of <1um.

PWM32-PS-CB15 of Headway Research is a versatile spin coater to deposit a thin layer of various positive and negative photoresists on 4” and 6” wafers for photolithography.

DV-502 of Denton Vacuum is a thermal evaporator to deposit various metals on a substrate. The DV-502B will reach 10-4 Torr in a clean and outgassed system within 3 minutes, and 2 x 10-5 Torr within 4 minutes in the standard 12” dia. X 12” high bell jar. No discernible contamination is produced in preparing specimens for electron microscopy. The 1 kVA evaporation power supply permits evaporation of most materials used in electron microscope specimen preparation including carbon, gold, gold palladium, platinum, etc., and can handle many of the evaporations required in various metalizing, optical coating and other applications. The DV-502B has sufficient pumping speed to handle all of the standard Denton accessories as well as larger bell jars up to 12” dia. X 18” high.

Bruker DektakXT Stylus Profiler enables unmatched repeatability that is better than 5 angstroms. The scan length range is 55mm and the vertical range is 1mm. The maximum wafer size is 200mm. 

A description will be posted when available.

THINKY MIXER is able to simultaneously carry out the two processes simultaneously, "mixing" and "deaeration" of PDMS in a small amount of time. For mixing and deaeration it uses 2 centrifugal forces: rotation and revolution. 

Harrick Plasma Cleaner is low-cost tabletop inductively coupled plasma device and can beused for surface cleaning, surface preparation and surface modification. In particular this system can quickly render poly(dimethylsiloxane) (PDMS), glass, and other polymer surfaces hydrophilic through plasma oxidation. 

The Ti-E offers a high-speed motorization capacity, and can be intelligently controlled in parallel through NIS-Elements software, providing exceptional image data throughput and enabling multi-dimensional image capture sequences that produce less damage to cells.

A description will be posted when available.

The SonoPlot® GIX Microplotter II is a precision picoliter fluid dispensing system. The core of the Microplotter is a dispenser that uses controlled ultrasonics to deposit fluid in a noncontact manner. It can produce picoliter droplets that form features on a surface as small as 5 µm wide. A wide range of fluids can be used, including aqueous solutions and many organic-solvent-based mixtures. The ultrasonic pumping action is also an efficient cleaning mechanism for quickly depositing many solutions sequentially. In addition to spots, the GIX Microplotter II can draw true continuous features, such as lines, arcs, and bends. These are uniform elements, not made from overlapping droplets.

The Varioskan® Flash is a spectral scanning multimode plate reader including fluorescence intensity, time-resolved fluorescence (TRF), photometric, and optional luminometric detection technologies. It is designed for optimization and analysis of various assays such as binding assays, ADMETox, molecular biology assays, enzyme kinetic studies, ion-channel and cell signaling assays.

The BD Accuri™ C6 benchtop flow cytometer is equipped with a blue laser and a red laser, two scatter detectors, and four fluorescence detectors with interference filters optimized for the detection of FITC, PE, PerCP-Cy™5.5, and APC.