Micro-Fabrication

The Micro-Fabrication Core Technology Platform is used for systems in biosensing, energy conversion, and human health. Utilizing spin coating, mask and bond aligning, reactive ion etching, and vacuum evaporator techniques, this CTP helps researchers produce micro- and nano-materials in a class 1,000 cleanroom environment.

Equipment List

  • 3D Nano Printer - Nanoscribe Photonic Professional GT
  • Atomic Layer Deposition (NLD-3500)
  • Magnetron Sputter - ATC ORION Series UHV Sputtering System
  • Mask Aligner - Karl Suss MA8
  • Mask Writer - Heidelberg Instruments DWL66+
  • Micro Dispensing System - M24You InstrumentTwo-200
  • Microplotter system - SonoPlot GIX II
  • Physical property measurement system (PPMS) – Quantum Design DynaCool 9T
  • Plasma Processor - Femtoscience COVANCE
  • PVD - Lesker Proline PVD 75
  • QCMD - Biolin QSense Analyzer
  • QSense High Pressure
  • Rapid thermal processing - Jipelec JetFirst 200C
  • Reactive Ion Etcher - Advanced Vacuum Vision 320
  • SDS PDS 2010 Labcoater 2 Parylene deposition system
  • Spectroscopic Imaging Nulling Ellipsometer Accurion EP4
  • Spin Coater - Headway PWM32-PS
  • Surface Profiler - Dektek XT-A
  • Thermal Evaporator – Angstrom Engineering  Nexdep 400
  • Vertisis Technology – MagVision Kerr System